Introduction to Optical Metrology examines the theory and practice of various measurement methodologies utilizing the wave nature of light. The book begins by introducing the subject of optics, and then addresses the propagation of laser beams through free space and optical systems. After explaining how a Gaussian beam propagates, how to set up a collimator to get a collimated beam for experimentation, and how to detect and record optical signals, the text:
- Discusses interferometry, speckle metrology, moiré phenomenon, photoelasticity, and microscopy
- Describes the different principles used to measure the refractive indices of solids, liquids, and gases
- Presents methods for measuring curvature, focal length, angle, thickness, velocity, pressure, and length
- Details techniques for optical testing as well as for making fiber optic- and MEMS-based measurements
- Depicts a wave propagating in the positive z-direction by ei(ωt – kz), as opposed to ei(kz – ωt)
Featuring exercise problems at the end of each chapter, Introduction to Optical Metrology provides an applied understanding of essential optical measurement concepts, techniques, and procedures.
Introduction to Optics
Introduction
Law of Reflection
Law of Refraction
Interference
Diffraction
Polarization
Fresnel Equations
Thin Film Optics
Optical Components
Refraction at Curved Interface
Paraxial Optics
Problems
Laser Beams
Gaussian Beams
The ABCD Law for Gaussian Beams
Laser Collimator
Vortex Beams
Bessel Beams
Problems
Sources, Detectors, and Recording Media
Introduction
Radiometric Units
Blackbody
Light Sources
Detectors
Recording Media
Image Detectors
Spatial Light Modulators
Problems
Interferometry
Introduction
Early History
Generation of Coherent Waves/Sources
Fringe Patterns
Some More Interferometers
Phase Shifting
Problems
Techniques
Holography and Hologram Interferometry
Speckle Phenomenon, Speckle Photography, and Speckle Interferometry
The Moiré Phenomena
Photoelasticity
Microscopy
Problems
Measurement of Refractive Index
Introduction
Spectrometer
Goniometer
Methods Based on the Measurement of Critical Angle
Measurement of Brewster Angle
Ellipsometry
Spectral Transmission Measurement
Interferometry
Problems
Measurement of Radius of Curvature and Focal Length
Introduction
Measurement of Radius of Curvature
Scanning Profilometry
Radius of Curvature Measurement by Talbot Interferometry
Measurement of Focal Length
Moiré Deflectometry
Problems
Optical Testing
Testing of a Flat Surface
Testing of Spherical Surfaces
Testing of Aspherical Surfaces
Oblique Incidence Interferometer
Shear Interferometry
Long Wavelength Interferometry
Problems
Angle Measurement
Definition of an Angle
Autocollimator
Goniometer
Interferometry
Problems
Thickness Measurement
Triangulation-Based Probe
Spectral Reflectometry
Ellipsometry
Interferometry
Low Coherence Interferometry
Confocal Microscopy
Light Section Microscopy
Problems
Measurement of Velocity
Introduction
Scattering from a Moving Particle-Doppler Shift
Scatter Light Beams Anemometry
Multichannel LDA Systems
Signal Processing
Particle Image Velocimetry
Measurement of Very High Velocity
Problems
Pressure Measurement
Pressure Sensitive Paint
Measurement of Pressure with Photoelastic Material
Ruby Pressure Standard
Fabry-Perot Etalon as Pressure Sensor
Problems
Fiber Optic- and MEM-Based Measurements
Introduction
Intensity Modulation
Phase Modulation
Pressure Sensor: Membrane Type
Bragg Grating Sensors
Polarization Maintaining Single-Mode Fibers
Fiber Optic Biosensors
Problems
Length Measurement
Introduction
Measurement of Gauge Blocks and Slip Gauges
Gauge Block Interferometry: Comparison with a Standard
Comb Generation and Gauge Block Calibration
Modulated Frequency-Displacement Sensor
Displacement Measurement with Interferometry
Angle Interferometer
The Moiré Technique for Displacement Measurement
Displacement Distribution Measurement
Moiré Techniques
Digital Image Correlation
Problems
Biography
Rajpal S. Sirohi, Ph.D, is currently chair professor of the Physics Department at Tezpur University, India, and senior editor of Optical Engineering. Previously, he was director of the Indian Institute of Technology Delhi; vice-chancellor of Barkatullah University, Bhopal; vice-chancellor of Shobhit University, Meerut; and vice-chancellor of Amity University, Jaipur. He also served in various capacities at the Indian Institute of Science, Bangalore; Indian Institute of Technology Madras, Chennai; Case Western Reserve University, Cleveland, Ohio, USA; Rose-Hulman Institute of Technology, Terre Haute, Indiana, USA; Institute for Advanced Studies, University of Malaya, Malaysia; University of Namibia; National University of Singapore; and École Polytechnique Fédérale de Lausanne, Switzerland. Widely published and highly decorated, Professor Sirohi is or has been a fellow, honorary fellow, invited fellow, member, board member, and former president of numerous scientific academies, associations, committees, societies, and journals.
"A good book for students and professionals to learn both basic and practical aspects of optical metrology."
—Mitsuo Takeda, Center for Optical Research and Education, Utsunomiya University, Japan
"The theory and practice of optical metrology is equally weighted in this book, an ideal combination for the instructor, student, and researcher."
—Ramen Bahuguna, San Jose State University, California, USA"The author’s way of writing/explaining is very well adapted to students and practical-thinking persons. The didactics show the long experience of the author."
—W. Osten, University Stuttgart, Germany